Electronic Sputtering of Thin Conductors by Neutralization of Slow Highly Charged Ions
Author:
Publisher
American Physical Society (APS)
Subject
General Physics and Astronomy
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevLett.78.2481/fulltext
Reference25 articles.
1. Energy dependence of the ion-induced sputtering yields of monatomic solids
2. Chemical Analysis of Inorganic and Organic Surfaces and Thin Films by Static Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS)
3. Sputtering of silicon by multiply charged ions
4. Fast heavy ion induced desorption
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