Theory of sputter yield fluctuations and calculation of the variance
Author:
Publisher
American Physical Society (APS)
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevB.52.16877/fulltext
Reference34 articles.
1. Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
2. Note on the Fluctuation Problem of Cascades
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