Electronic structure and optical properties of α and β phases of silicon nitride, silicon oxynitride, and with comparison to silicon dioxide
Author:
Publisher
American Physical Society (APS)
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevB.51.17379/fulltext
Reference93 articles.
1. Infrared optical properties of silicon oxynitride films: Experimental data and theoretical interpretation
2. Physical and Electrical Properties of Memory Quality PECVD Silicon Oxynitride
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