Statistical model for the formation of excited atoms in the sputtering process
Author:
Publisher
American Physical Society (APS)
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevB.25.700/fulltext
Reference80 articles.
1. Sputtering Yields for Low Energy He+‐, Kr+‐, and Xe+‐Ion Bombardment
2. Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets
3. II. The energy spectrum of ejected atoms during the high energy sputtering of gold
4. The flux distribution of sputtered potassium atoms
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