Implantation of keV-energy argon clusters and radiation damage in diamond
Author:
Publisher
American Physical Society (APS)
Subject
Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevB.85.033405/fulltext
Reference29 articles.
1. Gas Cluster Ion Beam Equipment and Applications for Surface Processing
2. Cluster beam deposition: a tool for nanoscale science and technology
3. Energetic cluster ion beams: Modification of surfaces and shallow layers
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