1. Higher Educational Key Laboratory for Measuring and Control Technology and Instrumentation of Heilongjiang Province, Harbin University of Science and Technology, Harbin, Heilongjiang, China
2. Research Center of Robotics and Micro System and Collaborative Innovation Center of Suzhou Nanoscience and Technology, Soochow University, Suzhou, Jiangsu, China
3. College of Automation, Harbin Engineering University, Harbin, Heilongjiang, China