Affiliation:
1. Faculty of Civil Aviation and Aeronautical, Kunming University of Science & Technology, Kunming, P.R. China
Abstract
In order to effectively control the vibration transmitted from the ground to the precision equipment, permanent magnet linear synchronous motor (PMLSM) can be effectively applied in the active vibration absorber systems due to its good characteristics. The design of a PMLSM is very important because of the special requirements of the damping system on the response speed, working temperature, working bandwidth and installation size of the PMLSM. In this paper, the multi-objective design problem of the PMLSM in vibration damping system is proposed. Based on the equivalent magnetic circuit analysis of the PML SM’s air gap magnetic field, the performance and design of the PMLSM are effectively analyzed in combination with the design objectives. The design and performance of the prototype meet the design requirements.
Subject
Artificial Intelligence,General Engineering,Statistics and Probability
Reference13 articles.
1. An Ultra-precision Stage for Alignment of Wafers in Advanced Microlithography;Lee;Precision Engineering,1997
2. Trend of Precision Positioning Technology;Kaiji;ABCM Symposium Series in Mechatronics,2006
3. Development of 100nm Step Scanning Projection Lithography Workpiece Stage and Mask Stage;Dong;Micro-nano Science and Technology,2004
4. Passive–active vibration isolation systems to produce zero or infinite dynamic modulus: theoretical and conceptual design strategies;Xing;Journal of Sound and Vibration,2005
5. Modeling and analysis of the disturbance about an active vibration isolation system;Qian;Sensor Review,2018
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