Author:
Qian Junbing,Yuan Ruibo,Bao Liping,Yang Xiaojing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference31 articles.
1. Y. Ping and L. Fuyun, Design and analysis of a novel oil-air vibration isolator for micro-electromechanical systems manufacturing platform. Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science 221 (2007), 195–201.
2. Development of a Three-Axis Active Vibration Isolator Using Zero-Power Control;Hoque;IEEE/ASME Transactions on Mechatronics,2006
3. Application of Voice Coil Motors in Active Dynamic Vibration isolators;Chen;IEEE Trans. Magn.,2005
4. An Ultra-precision Stage for Alignment of Wafers in Advanced Microlithography;Lee;Precision Engineering,1997
5. Trend of Precision Positioning Technology;Kaiji;ABCM Symposium Series in Mechatronics,2006
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献