Film thickness effect on structural, optical and electrical properties of indium oxide (In2O3) thin films grown via sol-gel method

Author:

Nouadji R.1,Attaf A.1,Derbali A.1,Bouhdjer A.1,Saidi H.1,Aida M.S.2,Zeribi F.3,Benkhetta O.1,Messemeche R.1,Nouadji M.1,Attaf N.4

Affiliation:

1. Physic Laboratory of Thin Films and Applications LPCMA, University of Biskra, Algeria

2. Department of Physics Faculty of Sciences, King Abdulaziz University, jeddah, Saudi Arabia

3. University of Ouargla, Faculty of Mathematics and Sciences of the Matter, Lab. Radiation and Plasmas and Surface Physics, Ouargla, Saudi Algeria

4. Equipe Plasmas et Couches Minces Unité de recherche Matériaux et applications, University of Constantine, Algeria

Abstract

In this work, we investigated the effect of the thickness on structural, morphological, optical, and electrical properties of In2O3 thin films synthesized via by sol–gel spin coating technique. The prepared samples were characterized by various techniques including X-ray diffraction (XRD), scanning electron microscope (SEM), energy-dispersive X-ray (EDX) spectra, UV-Vis-NIR spectrophotometer as well as the electrical measurements via the four-probe technique. The XRD analysis reveals that the films have a cubic crystalline structure, with (222) preferential orientation. The crystallite size values of the films were varied from 14 to 27 nm. The (SEM) images indicated that the homogenous and smooth surface with better adherent to the substrate surface. The EDX spectrum reveals the presence of In and O element necessary for In2O3 films for film formation. Excess of oxygen is observed due to the substrate contribution. The transmittance results exhibit that the films are highly transparent, more than 75% in the visible range from 400 nm to 800 nm is measured. The estimated band gap energy is found to increase with increasing film thickness (3.37–3.7 eV). The electrical resistivity of the In2O3 thin films substantially decreases with the increasing film thickness from 1.48×10-4 to 1.3×10-3 Ω.cm.

Publisher

IOS Press

Subject

Materials Chemistry,Inorganic Chemistry,Organic Chemistry

Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号  京ICP备18003416号-3