Measuring film thickness with Dual-laser imaging method-Reference-Cited by-同舟云学术

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Measuring film thickness with Dual-laser imaging method

Published:2018-02-27 Issue:2 Volume:34 Page:1153-1159
ISSN:1064-1246
Container-title:Journal of Intelligent & Fuzzy Systems
language:
Short-container-title:IFS

Author:

Ma Guolu¹,Liu Lixian¹,Yang Guiyang¹,Wang Chen²,Zhao Bin²

Affiliation:

1. Ministry of Education Key Laboratory of Testing Technology for Manufacturing Process, Southwest University of Science and Technology (SWUST), Mianyang, China

2. Department of Instrumentation, School of Mechanical Engineering, Huazhong University of Science and Technology (HUST), Wuhan, China

Publisher

IOS Press

Subject

Artificial Intelligence,General Engineering,Statistics and Probability

Reference12 articles.

1. Wu Y.P. , Zhang H.P. and Wu F. , Polymer Lithium Ion Batteries, Beijing: Chemical Industry Press, 2007, pp. 1–16.

2. Highly accurate film thickness measurement based on automatic fringe analysis;Abdelsalam;Optik,2012

3. Simple method for determination of the thickness of a nonabsorbing thin film using spectral reflectance measurement;Jiči;Appl Opt,2009

4. Thickness measurement of dielectric films by wavelength scanning method;Köysal;Opt Commun,2002

5. Ellipsometry: A sophisticated tool for optical metrology;Azzam;Proceedings of SPIE, Optical,2000

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A thickness measuring device of metal sheet based on dual triangulation through side irradiation with single camera;Review of Scientific Instruments;2019-09

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