Development of magnetically driven microvalve using photosensitive SU-8/Fe composite-Reference-Cited by-同舟云学术

Development of magnetically driven microvalve using photosensitive SU-8/Fe composite

Published:2016-12-29 Issue:3-4 Volume:52 Page:1585-1590
ISSN:1383-5416
Container-title:International Journal of Applied Electromagnetics and Mechanics
language:
Short-container-title:JAE

Author:

Suzuki Junya¹,Terao Kyohei¹,Takao Hidekuni¹,Shimokawa Fusao¹,Oohira Fumikazu²,Miyagawa Hayato³,Suzuki Takaaki⁴⁵

Affiliation:

1. Department of Intelligent Mechanical Systems Engineering, Kagawa University, Kagawa, Japan

2. Kagawa Branch, The Open University of Japan, Kagawa, Japan

3. Department of Advanced Materials Science, Kagawa University, Kagawa, Japan

4. Division of Mechanical Science of Technology, Gunma University, Gunma, Japan

5. JST, PRESTO, Japan

Publisher

IOS Press

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. The implementation of a thermal bubble actuated microfluidic chip with microvalve, micropump and micromixer;Huang;Sensor and Actuators A: Physical,2014

2. A disposable thermopneumatic-actuated micropump stacked with PDMS layers and ITO-coated glass;Kim;Sensor and Actuators A:Physical,2005

3. A TiNiPd thin film microvalve for high temperature applications;Liu;Materials Science and Engineering: A,2004

4. Recent advancements in chemical luminescence-based lab-on-chip and microfluidic platforms for bioanalysis;Mirasoli;Journal of Pharamaceutical and Biomedical Analysis,2014

5. Robotic cell injection force control based on static PVDF sensor and Fuzzy-PID control method;Sun;International Journal of Applied Electromagnetics and Mechanics,2013

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2. Self-aligned fabrication process for active membrane in magnetically driven micropump using photosensitive composite;Journal of Micromechanics and Microengineering;2020-01-09

3. Fabrication of Magnetically Driven Microvalve Arrays Using a Photosensitive Composite;Magnetochemistry;2018-01-06