An analysis of an unbounded thin film bulk acoustic wave piezoelectric resonator with a circular driving electrode-Reference-Cited by-同舟云学术

An analysis of an unbounded thin film bulk acoustic wave piezoelectric resonator with a circular driving electrode

Published:2017-12-18 Issue:1 Volume:56 Page:11-19
ISSN:1383-5416
Container-title:International Journal of Applied Electromagnetics and Mechanics
language:
Short-container-title:JAE

Author:

Liu Jing¹²,Ma Tingfeng¹,Du Jianke¹,Wang Ji¹,Yang Jiashi¹³

Affiliation:

1. Piezoelectric Device Laboratory, School of Mechanical Engineering and Mechanics, Ningbo University, Ningbo, Zhejiang 315211, China

2. School of Mechanical and Electrical Engineering, Ningbo Dahongying University, Ningbo, Zhejiang 315175, China

3. Department of Mechanical and Materials Engineering, the University of Nebraska-Lincoln, Lincoln, NE 68588-0526, USA

Publisher

IOS Press

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference25 articles.

1. Fundamental-mode VHF/UHF minature acoustic resonator and filters on silicon;Grudkowski;Applied Physics Letters,1980

2. Acoustic wave bulk composite resonator;Lakin;Applied Physics Letters,1981

3. ZnO/SiO2 diaphragm composite resonator on a silicon wafer;Nakamura;Electronics Letters,1981

4. K.M. Lakin, J. Wang, G. Kline, A. Landin, Y. Chin and J. Hunt, Thin film resonators and Filters, Proceedings of the 1982 IEEE Ultrasonics Symposium, San Diego, CA, 1982, pp. 466–473.

5. PCS 1900 MHz duplexer using thin film bulk acoustic resonators (FBARs);Ruby;Electronics Letters,1999

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. An Analysis of the Thermal Behavior and Effects of Circular Quartz Crystal Resonators for Microbalance Applications;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2022-08

2. Frequency perturbation integral for FBAR mass sensors and frequency shifts due to nonuniform mass layers;Applied Acoustics;2021-01

3. Modeling and Measurement of Complex Permittivity of Soils in UHF;IEEE Geoscience and Remote Sensing Letters;2020-07

4. The Design of a Frame-Like ZnO FBAR Sensor for Achieving Uniform Mass Sensitivity Distributions;Sensors;2020-04-23

5. Structural Optimization for Uniform Displacement Variations in ZnO FBAR Mass Sensor Using Rectangular Frame-Like Driving Electrodes;2019 14th Symposium on Piezoelectrcity, Acoustic Waves and Device Applications (SPAWDA);2019-11