Abstract
The electrostatic pull-in effect is a common phenomenon and a key parameter in the design of microscale and nanoscale devices. Flexible electronic devices based on the pull-in effect have attracted increasing attention due to their unique ductility. This review summarizes nanoelectromechanical switches made by flexible materials and classifies and discusses their applications in, among others, radio frequency systems, microfluidic systems, and electrostatic discharge protection. It is supposed to give researchers a more comprehensive understanding of the pull-in phenomenon and the development of its applications. Also, the review is meant to provide a reference for engineers to design and optimize devices.
Funder
Open research fund of the National and Local Joint Engineering Laboratory of RF Integration and Micro-Assembly Technology
Postgraduate Research & Practice Innovation Program of Jiangsu Province
Subject
Electrical and Electronic Engineering,General Physics and Astronomy,General Materials Science
Cited by
3 articles.
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