Ultra-thin atom layer deposited alumina film enables the precise lifetime control of fully biodegradable electronic devices-Reference-Cited by-同舟云学术

Ultra-thin atom layer deposited alumina film enables the precise lifetime control of fully biodegradable electronic devices

Published:2019 Issue:46 Volume:11 Page:22369-22377
ISSN:2040-3364
Container-title:Nanoscale
language:en
Short-container-title:Nanoscale

Author:

Huang Shuyi¹²³⁴⁵,Xuan Weipeng⁶⁷⁸⁹⁵,Liu Shuting¹²³⁴⁵,Tao Xiang¹²³⁴⁵,Xu Hongsheng¹²³⁴⁵,Zhan Shijie¹⁰¹¹¹²¹³,Chen Jinkai⁶⁷⁸⁹⁵,Cao Zhen¹²³⁴⁵,Jin Hao¹²³⁴⁵^ORCID,Dong Shurong¹²³⁴⁵,Zhou Hang¹⁴¹⁵¹⁶⁵^ORCID,Wang Xiaozhi¹²³⁴⁵^ORCID,Kim Jong Min¹⁰¹¹¹²¹³,Luo Jikui¹²³⁴⁵

Affiliation:

1. Key Laboratory of Micro-nano Electronic Devices and Smart Systems of Zhejiang Province

2. College of Information Science & Electronic Engineering

3. Zhejiang University

4. Hangzhou 310027

5. China

6. Key Laboratory of RF Circuits and Systems

7. Ministry of Education. College of Electronics & Information

8. Hangzhou Dianzi University

9. Hangzhou 310018

10. Department of Engineering

11. University of Cambridge

12. Cambridge

13. CB3 0FA UK

14. School of Electronic and Computer Engineering

15. Peking University Shenzhen Graduate School

16. Shenzhen, 518055

Abstract

ALD-grown ultra-thin alumina is proposed as an encapsulation layer to precisely control the lifetimes of biodegradable electronics, which enables surface acoustic wave devices to perform normally within designed period in bio-fluid.

Funder

Primary Research and Development Plan of Zhejiang Province

National Basic Research Program of China

National Natural Science Foundation of China

Fundamental Research Funds for the Central Universities

Publisher

Royal Society of Chemistry (RSC)

Subject

General Materials Science

Link

http://pubs.rsc.org/en/content/articlepdf/2019/NR/C9NR06566K

Reference43 articles.