A heavily doped germanium pyramid array for tunable optical antireflection in the broadband mid-infrared range-Reference-Cited by-同舟云学术

A heavily doped germanium pyramid array for tunable optical antireflection in the broadband mid-infrared range

Published:2022 Issue:15 Volume:10 Page:5797-5804
ISSN:2050-7526
Container-title:Journal of Materials Chemistry C
language:en
Short-container-title:J. Mater. Chem. C

Author:

Son Bongkwon¹²,Shin Sang-Ho¹,Jin Yuhao¹,Liao Yikai¹,Zhao Zhi-Jun³,Jeong Jun-Ho³^ORCID,Wang Qi Jie¹^ORCID,Wang Xincai²^ORCID,Tan Chuan Seng¹⁴,Kim Munho¹^ORCID

Affiliation:

1. School of Electrical and Electronic Engineering, Nanyang Technological University, 50 Nanyang Avenue, 639798, Singapore

2. Singapore Institute of Manufacturing Technology (SIMTech), A*STAR, 2 Fusionopolis Way, #08-04, Innovis, 138634, Singapore

3. Nano-Convergence Mechanical Systems Research Division, Korea Institute of Machinery and Materials, 156, Gajeongbuk-ro, Yuseong-gu, Daejeon 34103, South Korea

4. Low Energy Electronic Systems (LEES), Singapore-MIT Alliance for Research and Technology (SMART), 138602, Singapore

Abstract

A highly ordered microscale Ge inverted pyramid array is fabricated by HF-free metal-assisted chemical etching. Doping in the structure significantly modifies the reflection behavior in the mid-infrared region.

Funder

National Research Foundation Singapore

Agency for Science, Technology and Research

Nanyang Technological University

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2022/TC/D2TC00141A

Reference39 articles.

1. THz Frequency Selective Surface Filters for Earth Observation Remote Sensing Instruments