A highly sensitive humidity sensor with a novel hole array structure using a polyimide sensing layer
Author:
Publisher
Royal Society of Chemistry (RSC)
Subject
General Chemical Engineering,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2014/RA/C4RA02692F
Reference11 articles.
1. A high-speed capacitive humidity sensor with on-chip thermal reset
2. Stability and reliability of capacitive-type relative humidity sensors using crosslinked polyimide films
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4. Design studies on piezoresistive humidity sensors
5. A capacitive humidity sensor integrated with micro heater and ring oscillator circuit fabricated by CMOS–MEMS technique
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