1. National Key Laboratory of Advanced Micro and Nano Manufacture Technology, Shanghai Jiao Tong University, Shanghai 200240, China
2. Department of Micro/Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
3. State Key Laboratory of Advanced Optical Communication Systems and Networks, School of Physics and Astronomy, Shanghai Jiao Tong University, Shanghai 200240, China
4. Key Laboratory for Thin Film and Microfabrication Technology of the Ministry of Education, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai, 200240, China
5. Department of Mechanical Engineering, The University of Tokyo, Tokyo, 113-8656, Japan
6. State Key Laboratory of High-performance Precision Manufacturing, Dalian University of Technology, Dalian 116024, China
7. Department of Electrical & Computer Engineering and Texas Center for Superconductivity (TCSUH), University of Houston, Houston, 77204, TX, USA