Surface and interface structural analysis of W deposited on 6H–SiC substrates annealed in argon
Author:
Affiliation:
1. Department of Physics
2. University of Pretoria
3. Pretoria
4. South Africa
5. South African Nuclear Energy Corporation SOC Limited
6. Pretoria 0001
Abstract
A study of a tungsten (W) thin film deposited on a single crystalline 6H–SiC substrate and annealed in Ar at temperatures of 700 °C, 800 °C, 900 °C and 1000 °C for 1 hour was conducted.
Publisher
Royal Society of Chemistry (RSC)
Subject
General Chemical Engineering,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2017/RA/C6RA24825J
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