1. School of Microelectronics
2. Faculty of Electronic Information and Electrical Engineering
3. Key Lab. of Liaoning for Integrated Circuits Technology
4. Dalian University of Technology
5. Dalian
6. State Key Laboratory of Marine Resource Utilization in South China Sea
7. College of Materials and Chemical Engineering
8. Hainan University
9. Haikou 570228
10. PR China
11. State Key Lab of Transducer Technology
12. Shanghai Institute of Microsystem and Information Technology
13. Chinese Academy of Sciences
14. Shanghai
15. China