Affiliation:
1. Łukasiewicz Research Network–Institute of Microelectronics and Photonics, Warsaw, Poland
Abstract
SIMS profiling with atomic depth resolution enables qualitative characterization of MAX phase/MXene samples. With the deconvolution and calibration protocol, it is possible to quantify the composition of each atomic layer with 1% accuracy.
Funder
Narodowe Centrum Nauki
Narodowe Centrum Badań i Rozwoju
Publisher
Royal Society of Chemistry (RSC)