Catalytic conversion of carbon-containing impurity methyldichlorosilane to purify raw material trichlorosilane of polysilicon production-Reference-Cited by-同舟云学术

Catalytic conversion of carbon-containing impurity methyldichlorosilane to purify raw material trichlorosilane of polysilicon production

Published:2022 Issue:7 Volume:7 Page:1544-1554
ISSN:2058-9883
Container-title:Reaction Chemistry & Engineering
language:en
Short-container-title:React. Chem. Eng.

Author:

Geng Qiang¹^ORCID,Huang Guoqiang¹

Affiliation:

1. School of Chemical Engineering and Technology, Tianjin University, Tianjin 300072, China

Abstract

Under the condition of activated carbon catalysis, using silicon tetrachloride as the chlorine source, the conversion rate of methyldichlorosilane to methyltrichlorosilane is higher than 80%.

Funder

National Natural Science Foundation of China

Publisher

Royal Society of Chemistry (RSC)

Subject

Fluid Flow and Transfer Processes,Process Chemistry and Technology,Chemical Engineering (miscellaneous),Chemistry (miscellaneous),Catalysis

Link

http://pubs.rsc.org/en/content/articlepdf/2022/RE/D1RE00569C

Reference25 articles.

1. Approaches to hydrogenation of silicon tetrachloride in polysilicon manufacture

2. Silicon feedstock for the multi-crystalline photovoltaic industry

3. PV solar electricity industry: Market growth and perspective

4. Bulk solar grade silicon: how chemistry and physics play to get a benevolent microstructured material

5. Solar grade silicon feedstock supply for PV industry

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1. Chlorination of trichlorosilane/chlorodimethylsilane using metal chlorides: experimental and mechanistic investigations;RSC Advances;2023