1. School of Electronics and Information Engineering, Hebei University of Technology, Hebei Collaborative Innovation Center of Microelectronic Materials and Technology on Ultra Precision Processing (CIC), Hebei Engineering Research Center of Microelectronic Materials and Devices (ERC), Tianjin, 300130, China
2. School of Physics and Electronic Information Engineering, Henan Polytechnic University, Jiaozuo, 454003, China
3. School of Mechanical Engineering, Hebei University of Technology, Tianjin, 300401, China