Atmospheric atomic layer deposition of SnO<sub>2</sub> thin films with tin(<scp>ii</scp>) acetylacetonate and water-Reference-Cited by-同舟云学术

Atmospheric atomic layer deposition of SnO₂ thin films with tin(ii) acetylacetonate and water

Published:2022 Issue:24 Volume:51 Page:9278-9290
ISSN:1477-9226
Container-title:Dalton Transactions
language:en
Short-container-title:Dalton Trans.

Author:

Nguyen Viet Huong¹^ORCID,Akbari Masoud²³^ORCID,Sekkat Abderrahime²^ORCID,Ta Huong T. T.¹,Resende Joao⁴^ORCID,Jiménez Carmen²^ORCID,Musselman Kevin P.³^ORCID,Muñoz-Rojas David²^ORCID

Affiliation:

1. Faculty of Materials Science and Engineering, Phenikaa University, Hanoi 12116, Vietnam

2. Univ. Grenoble Alpes, CNRS, Grenoble INP, LMGP, Grenoble, France

3. Department of Mechanical and Mechatronics Engineering, University of Waterloo, Canada

4. AlmaScience Colab, Madan Parque, 2829-516 Caparica, Portugal

Abstract

Our work presents a new process for the spatial atomic layer deposition (SALD) of SnO2 thin films from tin(ii) acetylacetonate and water, supported by a DFT study of different Sn metalorganic precursors.

Funder

Agence Nationale de la Recherche

National Foundation for Science and Technology Development

Natural Sciences and Engineering Research Council of Canada

Publisher

Royal Society of Chemistry (RSC)

Subject

Inorganic Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2022/DT/D2DT01427K

Reference77 articles.

1. SnO2 : A Wonderful Electron Transport Layer for Perovskite Solar Cells