Low temperature synthesis of graphite on Ni films using inductively coupled plasma enhanced CVD
Author:
Affiliation:
1. Department of Materials Science and Engineering
2. The University of Texas at Dallas
3. Richardson
4. USA
5. School of Advanced Materials Engineering
6. Kookmin University
7. Seoul
8. Korea
9. Texas Instruments
10. Dallas
Abstract
Synthesis of good quality graphite on Ni using IC-PECVD at a low temperature of 380 °C in a hydrogen free environment.
Publisher
Royal Society of Chemistry (RSC)
Subject
Materials Chemistry,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2015/TC/C5TC00635J
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