Fabrication of 3D ZnO hollow shell structures by prism holographic lithography and atomic layer deposition-Reference-Cited by-同舟云学术

Fabrication of 3D ZnO hollow shell structures by prism holographic lithography and atomic layer deposition

Published:2014 Issue:11 Volume:2 Page:1957-1961
ISSN:2050-7526
Container-title:J. Mater. Chem. C
language:en
Short-container-title:J. Mater. Chem. C

Author:

Park Sung-Gyu¹²³,Jeon Tae Yoon⁴⁵⁶⁷,Jeon Hwan Chul⁴⁵⁶⁷,Yang Seung-Man⁴⁵⁶⁷,Kwon Jung-Dae¹²³,Mun Chae-Won¹²³,Cho Byungjin¹²³,Kim Chang Su¹²³,Kim Dong-Ho¹²³

Affiliation:

1. Advanced Functional Thin Films Department

2. Korea Institute of Materials Science (KIMS)

3. Changwon, Korea

4. National Creative Research Initiative Center for Integrated Optofluidic Systems

5. Department of Chemical and Biomolecular Engineering

6. KAIST

7. Daejeon, Korea

Abstract

This paper presents the fabrication of 3D ZnO hollow shell structures using prism holographic lithography and atomic layer deposition.

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2014/TC/C3TC32366H

Reference39 articles.

1. A comprehensive review of ZnO materials and devices

2. Recent progress in the ZnO nanostructure-based sensors

3. Novel nanostructures of ZnO for nanoscale photonics, optoelectronics, piezoelectricity, and sensing

4. 19·9%-efficient ZnO/CdS/CuInGaSe2 solar cell with 81·2% fill factor

5. A 5% efficient photoelectrochemical solar cell based on nanostructured ZnO electrodes

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