Experimental evidence for the molecular molybdenum fluorides MoF to MoF6: a matrix isolation and DFT investigation
Author:
Affiliation:
1. Department of Chemistry and Biochemistry, The University of Hull, Kingston upon Hull, HU6 7RX, UK
2. Department of Physics and Mathematics, The University of Hull, Kingston upon Hull, HU6 7RX, UK
Abstract
Funder
Engineering and Physical Sciences Research Council
University of Hull
Publisher
Royal Society of Chemistry (RSC)
Subject
Materials Chemistry,General Chemistry,Catalysis
Link
http://pubs.rsc.org/en/content/articlepdf/2022/NJ/D1NJ06062G
Reference107 articles.
1. Chemical Vapor Deposition of Molybdenum Silicide
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3. The kinetics of the low-pressure chemical vapour deposition of molybdenum on silicon from molybdenum hexafluoride and hydrogen
4. Thin film deposition of Mo and Mo-compounds by PECVD from Mo(CO)6 and MoF6 as precursors: characterization of films and thermodynamic analysis
5. Atomic layer deposition of molybdenum disulfide films using MoF6 and H2S
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