1. International Research Centre for Nano Handling and Manufacturing of China
2. Changchun University of Science and Technology
3. Changchun 130022
4. China
5. Ministry of Education Key Laboratory for Cross-Scale Micro and Nano Manufacturing
6. College of Information Engineering
7. North China University of Science and Technology
8. Tangshan 063210
9. School of Science
10. Key Laboratory of Laser Technology and Optoelectronic Functional Materials of Hainan Province
11. School of Physics and Electronic Engineering
12. Hainan Normal University
13. Haikou 571158