1. Key Laboratory of Advanced Transducers and Intelligent Control System, Ministry of Education, Taiyuan University of Technology, Taiyuan 030024, China
2. College of Optoelectronics, Taiyuan University of Technology, Taiyuan 030024, China
3. Xi'an Institute of Optics and Precision Mechanics of CAS, Xi'an, Shanxi, 710119, China
4. College of Electrical and Power Engineering, Taiyuan University of Technology, Taiyuan 030024, China