Tribochemistry-induced direct fabrication of nondestructive nanochannels on silicon surface-Reference-Cited by-同舟云学术

Tribochemistry-induced direct fabrication of nondestructive nanochannels on silicon surface

Published:2015 Issue:122 Volume:5 Page:100769-100774
ISSN:2046-2069
Container-title:RSC Advances
language:en
Short-container-title:RSC Adv.

Author:

Guo Jian¹²³⁴⁵,Xiao Chen¹²³⁴⁵,Peng Bei⁶⁷⁸⁵,Qian Linmao¹²³⁴⁵

Affiliation:

1. Tribology Research Institute

2. Key Laboratory of Advanced Technologies of Materials (Ministry of Education)

3. Southwest Jiaotong University

4. Chengdu 610031

5. P. R. China

6. School of Mechatronics Engineering

7. University of Electronic Science and Technology of China

8. Chengdu 611731

Abstract

A maskless, straightforward and crystal plane-independent nanofabrication approach is proposed to produce nondestructive nanochannels on monocrystalline silicon through tribochemical reaction.

Funder

National Natural Science Foundation of China

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemical Engineering,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2015/RA/C5RA21922A

Reference31 articles.

1. Chaotic Mixer for Microchannels

2. Electrokinetically-Driven Transport of DNA through Focused Ion Beam Milled Nanofluidic Channels

3. Ion Transport in Nanofluidic Funnels

4. Nanoengineered device for drug delivery application

5. Nitrogen supported solvent evaporation using continuous-flow microfluidics

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