Wet-etching of structures with straight facets and adjustable taper into glass substrates-Reference-Cited by-同舟云学术

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Wet-etching of structures with straight facets and adjustable taper into glass substrates

Published:2010 Issue:4 Volume:10 Page:494-498
ISSN:1473-0197
Container-title:Lab Chip
language:en
Short-container-title:Lab Chip

Author:

Pekas Nikola,Zhang Qing,Nannini Matthieu,Juncker David

Publisher

Royal Society of Chemistry (RSC)

Subject

Biomedical Engineering,General Chemistry,Biochemistry,Bioengineering

Link

http://pubs.rsc.org/en/content/articlepdf/2010/LC/B912770D

Reference25 articles.

1. M. J. Madou , Fundamentals of microfabrication: the science of miniaturization, CRC Press, Boca Raton, Fla., London, 2002

2. Isotropically etched radial micropore for cell concentration, immobilization, and picodroplet generation

3. A new masking technology for deep glass etching and its microfluidic application

4. The evaporated metal masks for chemical glass etching for BioMEMS

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