1. State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering
2. Institute of Optics and Electronics
3. Chinese Academy of Science
4. Chengdu 610209, China
5. Key Laboratory of Optoelectronic Technology and System
6. University of Chinese Academy of Sciences
7. Ministry of Education
8. Chongqing University
9. Chongqing 400044, China