1. Shaanxi Province Key Laboratory of Thin Films Technology and Optical Test, Xi'an Technological University, Xi'an, 710032, China
2. Research and Development Center of Optoelectronic Hybrid IC, Guangdong Greater Bay Area Institute of Integrated Circuit and System, Guangdong, 510535, China
3. Xi'an Xiangteng Microelectronics Technology Co., Ltd, Xi'an, 710075, China
4. School of Physics and Information Engineering, Shanxi Normal University, Linfen, 041004, China
5. Key Laboratory of Wide Band-Gap Semiconductor Materials and Devices, School of Microelectronics, Xidian University, Xi'an, 710071, China
6. Key Laboratory of Microelectronic Devices & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing, 100029, China