Chip-scale short-wavelength infrared InGaAs microspectrometer based on a linear variable optical filter-Reference-Cited by-同舟云学术

Chip-scale short-wavelength infrared InGaAs microspectrometer based on a linear variable optical filter

Published:2023 Issue:37 Volume:11 Page:12698-12706
ISSN:2050-7526
Container-title:Journal of Materials Chemistry C
language:en
Short-container-title:J. Mater. Chem. C

Author:

Jeon Jiyeon¹,Park Suho¹²,Kim Yeongho³^ORCID,Nguyen Phuc Dinh¹²^ORCID,Chun Byong Sun¹^ORCID,Lee Sang Jun¹²

Affiliation:

1. Division of Interdisciplinary Materials Measurement Institute, Korea Research Institute of Standards and Science, Daejeon 34113, Republic of Korea

2. Department of Nano Convergence Measurement, University of Science & Technology, Daejeon 34113, Republic of Korea

3. School of Materials Science & Engineering, Chonnam National University, Gwangju 61186, Republic of Korea

Abstract

An extended short-wavelength infrared microspectrometer by monolithic integrarion of a 256 × 1 InGaAs linear array detector with a wedge-shaped Si/SiO2 Fabry-Perot linear variable optical filter.

Funder

National Research Foundation of Korea

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2023/TC/D3TC01239E

Reference29 articles.

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