Quantifying low fluence ion implants in diamond-like carbon film by secondary ion mass spectrometry by understanding matrix effects-Reference-Cited by-同舟云学术

Quantifying low fluence ion implants in diamond-like carbon film by secondary ion mass spectrometry by understanding matrix effects

Published:2021 Issue:1 Volume:36 Page:194-209
ISSN:0267-9477
Container-title:Journal of Analytical Atomic Spectrometry
language:en
Short-container-title:J. Anal. At. Spectrom.

Author:

Jurewicz Amy J. G.¹²³⁴^ORCID,Olinger Chad T.⁵⁶⁷⁴^ORCID,Burnett Donald S.⁸⁹¹⁰⁴^ORCID,Guan Yunbin⁸⁹¹⁰⁴,Hervig Richard¹¹¹¹²⁴^ORCID,Rieck Karen D.¹³¹⁴⁴^ORCID,Woolum Dorothy S.¹⁵¹⁶¹⁷⁴^ORCID

Affiliation:

1. Arizona State University

2. Center for Meteorite Studies

3. Tempe AZ 85287-6004

4. USA

5. GET, Inc.

6. AU-62

7. Germantown

8. California Institute of Technology

9. Dept. of Geology and Planetary Sciences

10. Pasadena

11. School of Earth and Space Exploration

12. Tempe AZ 85287-1404

13. New Mexico Consortium

14. Los Alamos

15. California State University Fullerton

16. Department of Physics

17. Fullerton CA 92834-6866

Abstract

Secondary ion mass spectrometry (SIMS) data from diamond like carbon (DLC) often give inaccurate, imprecise results when methods tailored for silicon are applied. This work is a guide to accurate and precise results from future SIMS analyses of DLC.

Funder

National Science Foundation

National Aeronautics and Space Administration

Jet Propulsion Laboratory

Publisher

Royal Society of Chemistry (RSC)

Subject

Spectroscopy,Analytical Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2021/JA/D0JA00375A

Reference26 articles.

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2. Diamond-like amorphous carbon

3. Compositional depth profiling of diamond-like carbon layers by glow discharge optical emission spectroscopy

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