Fabrication of sub-1 nm gap electrodes using metal-mask patterning and conductivity measurements of molecules in nanoscale spaces

Author:

Naitoh Yasuhisa12345ORCID,Albrecht Ken67859ORCID,Wei Qingshuo1011345ORCID,Yamamoto Kimihisa67859ORCID,Shima Hisashi12345,Ishida Takao1011345

Affiliation:

1. Nanoelectronics Research Institute

2. Department of Electronics and Manufacturing

3. National Institute of Advanced Industrial Science and Technology (AIST)

4. Tsukuba

5. Japan

6. Laboratory for Chemistry and Life Science

7. Tokyo Institute of Technology

8. Yokohama 226-8503

9. JST

10. Nanomaterials Research Institute

11. Department of Materials and Chemistry

Abstract

Fabrications of sub-1 nm gap Au electrodes using a metal mask for patterning were achieved. Because the procedure does not involve wet processing, the ranges of possible electrode and substrate materials for the electrodes are greatly expanded.

Funder

Japan Society for the Promotion of Science

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemical Engineering,General Chemistry

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