1. Key Laboratory of Inorganic Functional Materials and Devices, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 201800, China
2. Education Ministry Key Lab of Resource Chemistry and Shanghai Key Laboratory of Rare Earth Functional Materials, Shanghai Normal University, Shanghai, 200234, China
3. United Microelectronics Center Ltd, China
4. College of Materials Science and Engineering, Chongqing University of Technology, Chongqing 400054, China