Acid-amplifying polymers: synthesis, characterization, and application to environmentally stable chemical amplification positive (ESCAP) resists-Reference-Cited by-同舟云学术

Acid-amplifying polymers: synthesis, characterization, and application to environmentally stable chemical amplification positive (ESCAP) resists

Published:2015 Issue:98 Volume:5 Page:80311-80317
ISSN:2046-2069
Container-title:RSC Advances
language:en
Short-container-title:RSC Adv.

Author:

Arimitsu K.¹²³⁴,Yonekura M.¹²³⁴,Furutani M.¹²³⁴

Affiliation:

1. Department of Pure and Applied Chemistry

2. Tokyo University of Science

3. Noda

4. Japan

Abstract

Polymers bearing acid-amplifying units were designed to suppress the excess diffusion of acid species, evaluated for their photosensitivity with photoacid generators, and applied for positive-working ESCAP resists.

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemical Engineering,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2015/RA/C5RA15423E

Reference23 articles.

1. Chemical Amplification in High-Resolution Imaging Systems

2. Chemical amplification resists: Inception, implementation in device manufacture, and new developments

3. Application of silylether and silylester polymer for chemical amplification system.

4. Chemically Amplified Bilevel Resist Based on Condensation of Siloxanes

5. Poly(siloxane)-Based Chemically Amplified Resist Convertible into Silicate Glass

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Exceptional Lithography Sensitivity Boosted by Hexafluoroisopropanols in Photoresists;Polymers;2024-03-15

2. 极紫外光刻的随机性问题及其研究进展;Chinese Journal of Lasers;2024

3. Comprehensive studies of continuous flow reversible addition–fragmentation chain transfer copolymerization and its application for photoimaging materials;Polymer Chemistry;2022

4. Designing self-propagating polymers with ultrasensitivity through feedback signal amplification;Polymer Chemistry;2021

5. Photoacid generators. Application and current state of development;Russian Chemical Reviews;2020-02-01