1. State Key Laboratory of Silicon Materials and School of Materials Science and Engineering, Zhejiang University, Hangzhou, Zhejiang 310027, People's Republic of China
2. BTR New Material Group CO., LTD., GuangMing District, Shenzhen 518106, People's Republic of China
3. Institute of Advanced Semiconductors, Hangzhou Innovation Center, Zhejiang University, Hangzhou, Zhejiang 310027, People's Republic of China