1. School of Physics and Optoelectronic Engineering, Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Hangzhou 310024, China
2. State Key Laboratory of Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
3. University of Chinese Academy of Sciences, Beijing 100049, China
4. Ministry of Education Key Laboratory for Green Preparation and Application of Functional Materials, Hubei Provincial Key Laboratory of Polymers, School of Materials Science and Engineering, Hubei University, Wuhan 430062, P. R. China
5. Innovation Center of Research Institute of Tsinghua University in Zhuhai, Zhuhai 519000, China
6. School of Physical Science and Technology, ShanghaiTech University, Shanghai 201210, China
7. Institute of Microelectronics Technology and High-Purity Materials Russian Academy of Sciences, Chernogolovka, Moscow 142432, Russia