Abstract
This chapter introduces the layout design tools for microfluidic devices and presents a new script-based method to generate complex layouts of microfluidic devices using Nanolithography Toolbox (NT) software. Compared with other computer-aided design or integrated circuits-based software, NT software is based on an extensive set of parameterized blocks and features, formulated into a simple text file, which is converted into a GDSII format to fabricate lithography masks. The utilization of NT software for structures such as capillary electrophoresis chips, microfluidic emulsion generator array chips using centrifugal forces, chambers, splitters and mixers, etc., is demonstrated. This NT software is a powerful yet easy-to-use tool to generate the layout of microfluidic devices.
Publisher
The Royal Society of Chemistry