Fundamental scaling laws for the direct-write chemical vapor deposition of nanoscale features: modeling mass transport around a translating nanonozzle
Author:
Affiliation:
1. Massachusetts Institute of Technology
2. Department of Chemical Engineering
3. Cambridge
4. USA
Abstract
The nanometer placement of nanomaterials, such as nanoribbons and nanotubes, at a specific pitch and orientation on a surface, remains an unsolved fundamental problem in nanotechnology.
Funder
Army Research Office
Publisher
Royal Society of Chemistry (RSC)
Subject
General Materials Science
Link
http://pubs.rsc.org/en/content/articlepdf/2019/NR/C8NR10366F
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1. Precise Positioning of Nanoparticles on Surfaces Using Scanning Probe Lithography
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