1. Kazan Federal University
2. Kazan
3. Russia
4. Institute of Microstructure Technology
5. Karlsruhe Institute of Technology (KIT)
6. Prokhorov General Physics Institute of the Russian Academy of Sciences (GPI RAS)
7. Moscow
8. Institute for Applied Materials
9. Eggenstein-Leopoldshafen
10. Germany
11. Light Technology Institute