Rapid fabrication of solid-state nanopores with high reproducibility over a large area using a helium ion microscope-Reference-Cited by-同舟云学术

Rapid fabrication of solid-state nanopores with high reproducibility over a large area using a helium ion microscope

Published:2018 Issue:11 Volume:10 Page:5198-5204
ISSN:2040-3364
Container-title:Nanoscale
language:en
Short-container-title:Nanoscale

Author:

Xia Deying¹²³⁴⁵^ORCID,Huynh Chuong¹²³⁴⁵^ORCID,McVey Shawn¹²³⁴⁵,Kobler Aaron¹²³⁴⁵,Stern Lewis¹²³⁴⁵,Yuan Zhishan⁶⁷⁸⁹,Ling Xinsheng Sean⁶⁷⁸⁹¹⁰^ORCID

Affiliation:

1. Ion Microscopy Innovation Center

2. Carl Zeiss Microscopy LLC

3. One Corporation Way

4. Peabody

5. USA

6. School of Mechanical Engineering

7. Southeast University and NJRI Inc.

8. Nanjing

9. China

10. Department of Physics

Abstract

The practical issues (reproducibility, time and pore size control) for massive fabrication of nanopores over a wafer size of several inches for biomolecule detection are addressed here.

Funder

Southeast University

Publisher

Royal Society of Chemistry (RSC)

Subject

General Materials Science

Link

http://pubs.rsc.org/en/content/articlepdf/2018/NR/C7NR08406D

Reference29 articles.

1. Single molecule sensing with solid-state nanopores: novel materials, methods, and applications

2. Solid-state nanopores

3. Single molecule detection with graphene and other two-dimensional materials: nanopores and beyond

4. Sub-5nm FIB direct patterning of nanodevices

5. Ion-beam sculpting at nanometre length scales

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