Fabrication of well-ordered silicon nanopillars embedded in a microchannel via metal-assisted chemical etching: a route towards an opto-mechanical biosensor-Reference-Cited by-同舟云学术

Fabrication of well-ordered silicon nanopillars embedded in a microchannel via metal-assisted chemical etching: a route towards an opto-mechanical biosensor

Published:2016 Issue:88 Volume:6 Page:85666-85674
ISSN:2046-2069
Container-title:RSC Advances
language:en
Short-container-title:RSC Adv.

Author:

Solis-Tinoco V.¹²³⁴⁵^ORCID,Marquez S.¹²³⁴⁵^ORCID,Sepulveda B.¹²³⁴⁵,Lechuga L. M.¹²³⁴⁵

Affiliation:

1. Nanobiosensors and Bioanalytical Applications Group

2. Catalan Institute of Nanoscience and Nanotechnology (ICN2)

3. CSIC

4. The Barcelona Institute of Science and Technology

5. Bellaterra

Abstract

Nanofabrication methodology that integrates the creation of silicon nanopillars inside a microfluidic channel which has significant implications for the achievement of new optomechanical biosensors.

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemical Engineering,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2016/RA/C6RA15485A

Reference54 articles.

1. Infrared detection from GaInAs/InP nanopillar arrays

2. Nanopillar ZnO gas sensor for hydrogen and ethanol

3. Role of reaction kinetics and mass transport in glucose sensing with nanopillar array electrodes

4. Highly sensitive thermal detection of thrombin using aptamer-functionalized phase change nanoparticles

5. Construction of a more sensitive fluorescence sensing material for the detection of vascular endothelial growth factor, a biomarker for angiogenesis, prepared by combining a fluorescent peptide and a nanopillar substrate

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