1. Shenzhen Institutes of Advanced Electronic Materials, Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen 518055, China
2. Institute of Intelligent Manufacturing Technology, Shenzhen Polytechnic, Shenzhen 518055, China
3. School of Materials Science and Engineering, Nanjing Institute of Technology, Nanjing 211167, China
4. Institute of Critical Materials for Integrated Circuits, Shenzhen Polytechnic, Shenzhen, 518055, China