Large-area scanning probe nanolithography facilitated by automated alignment of probe arrays
Author:
Affiliation:
1. School of Electrical and Electronic Engineering
2. University of Manchester
3. Manchester M13 9PL
4. UK
5. Manchester Institute of Biotechnology & School of Chemistry
6. Manchester M1 7DN
Abstract
A method for the automated alignment of scanning probe polymer pen arrays is reported. This system enables nanolithography over large (cm2) areas with high uniformity, with any misalignment being ≤0.0003°.
Funder
Engineering and Physical Sciences Research Council
Publisher
Royal Society of Chemistry (RSC)
Subject
General Chemical Engineering,General Chemistry
Link
http://pubs.rsc.org/en/content/articlepdf/2015/RA/C5RA11967G
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