Shock-tube study of the decomposition of tetramethylsilane using gas chromatography and high-repetition-rate time-of-flight mass spectrometry-Reference-Cited by-同舟云学术

Shock-tube study of the decomposition of tetramethylsilane using gas chromatography and high-repetition-rate time-of-flight mass spectrometry

Published:2018 Issue:16 Volume:20 Page:10686-10696
ISSN:1463-9076
Container-title:Physical Chemistry Chemical Physics
language:en
Short-container-title:Phys. Chem. Chem. Phys.

Author:

Sela P.¹²³⁴⁵^ORCID,Peukert S.¹²³⁴⁵,Herzler J.¹²³⁴⁵,Fikri M.¹²³⁴⁵,Schulz C.¹²³⁴⁵

Affiliation:

1. IVG

2. Institute for Combustion and Gas Dynamics – Reactive Fluids and CENIDE

3. Center for Nanointegration Duisburg-Essen

4. University of Duisburg-Essen

5. 47057 Duisburg

Abstract

The decomposition of tetramethylsilane was studied in shock-tube experiments in a temperature range of 1270–1580 K and pressures ranging from 1.5 to 2.3 bar behind reflected shock waves combining GC/MS and HRR-TOF-MS.

Funder

Deutsche Forschungsgemeinschaft

Horizon 2020 Framework Programme

Publisher

Royal Society of Chemistry (RSC)

Subject

Physical and Theoretical Chemistry,General Physics and Astronomy

Link

http://pubs.rsc.org/en/content/articlepdf/2018/CP/C7CP06827A

Reference33 articles.

1. High-Temperature Chemical Vapor Deposition for SiC Single Crystal Bulk Growth Using Tetramethylsilane as a Precursor

2. Synthesis of α-SiC from tetramethylsilane by chemical vapor deposition at high temperature

3. A morphological and structural study of SiC layers obtained by LPCVD using tetramethylsilane

4. A thermodynamical approach to tetramethylsilane (TMS) pyrolysis; application to SiC coatings obtained by MOCVD

5. Investigation of the chemical vapor deposition of silicon carbide from tetramethylsilane by in situ temperature and gas composition measurements

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