1. Institute of Laser and Optoelectronic Intelligent Manufacturing, Wenzhou University, Wenzhou 325035, P. R. China
2. Zhenjiang Key laboratory of advanced sensing materials and devices, School of Mechanical Engineering, Jiangsu University, Zhenjiang 212013, P. R. China
3. Institute for Quantum Science and Engineering and Department of Physics, Southern University of Science and Technology, Shenzhen 518055, P. R. China
4. Guangdong Provincial Key laboratory of Quantum Science and Engineering, Southern University of Science and Technology, Shenzhen 518055, P. R. China
5. State Key Laboratory of Transducer Technology, Chinese Academy of Sciences, Shanghai 200050, China