Single-crystalline-like indium tin oxide thin films prepared by plasma enhanced atomic layer deposition

Author:

Hsu Chia-Hsun1,Zhang Zhi-Xuan1,Shi Chun-Yan1,Huang Pao-Hsun2,Wu Wan-Yu3,Wuu Dong-Sing4ORCID,Gao Peng5ORCID,Huang Chien-Jung6,Lien Shui-Yang17ORCID,Zhu Wen-Zhang1

Affiliation:

1. School of Opto-electronic and Communication Engineering, Xiamen University of Technology, Xiamen, 361024, China

2. School of Ocean Information Engineering, Jimei University, 183 Yinjiang Road, Jimei, Xiamen 361021, Fujian, China

3. Department of Materials Science and Engineering, National United University, Miaoli 36063, Taiwan

4. Department of Applied Materials and Optoelectronic Engineering, National Chi Nan University, Nantou 54561, Taiwan

5. Fujian Provincial Key Laboratory of Nanomaterials, Fujian Institute of Research on the Structure of Matter, Chinese Academy of Sciences, Fuzhou, Fujian 350002, China

6. Department of Applied Physics, National University of Kaohsiung, Kaohsiung, Kaohsiung University Rd., 81148, Taiwan

7. Department of Materials Science and Engineering, Da-Yeh University, Changhua, 51591, Taiwan

Abstract

Plasma enhanced atomic layer deposited indium tin oxide films using InCp, TDMASn and O2 plasma as metal and oxygen precursors exhibit a single-crystalline-like structure, high carrier mobility and low resistivity.

Funder

Department of Education, Fujian Province

Natural Science Foundation of Fujian Province

National Natural Science Foundation of China

Xiamen University of Technology

Publisher

Royal Society of Chemistry (RSC)

Subject

Materials Chemistry,General Chemistry

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号  京ICP备18003416号-3