1. Graduate Institute of Electro-Optical Engineering and Department of Electronic and Computer Engineering, National Taiwan University of Science and Technology, Taipei 106, Taiwan
2. Department of Mechanical Engineering, National Taiwan University of Science and Technology, Taipei 106335, Taiwan
3. Department of Materials Engineering and Center for Plasma and Thin Film Technologies, Ming Chi University of Technology, New Taipei City 24301, Taiwan
4. College of Engineering and Center for Green Technology, Chang Gung University, Taoyuan 333323, Taiwan